光电-静电复合驱动器的驱动性能

吕振,王新杰,刘亚风,赵勇筌

Driving performance of photovoltaic-electrostatic hybrid actuator

Zhen LV,Xin-jie WANG,Ya-feng LIU,Yong-quan ZHAO

图 3 光电-静电复合驱动器闭环控制模型

Fig.3 Closed-loop control model of photovoltaic electrostatic hybrid actuator