光电-静电复合驱动器的驱动性能

吕振,王新杰,刘亚风,赵勇筌

Driving performance of photovoltaic-electrostatic hybrid actuator

Zhen LV,Xin-jie WANG,Ya-feng LIU,Yong-quan ZHAO

图 2 PLZT陶瓷的光-电-热-力多物理场耦合关系

Fig.2 Coupling relationship of opto-electric-thermo-mechanic fields of PLZT ceramic