光电-静电复合驱动器的驱动性能
Driving performance of photovoltaic-electrostatic hybrid actuator
光电-静电复合驱动器的驱动性能 |
| 吕振,王新杰,刘亚风,赵勇筌 |
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Driving performance of photovoltaic-electrostatic hybrid actuator |
| Zhen LV,Xin-jie WANG,Ya-feng LIU,Yong-quan ZHAO |
| 图 10 60 mW/cm2辐射照度下驱动器的位移闭环控制仿真曲线 |
| Fig.10 Closed-loop displacement control of actuator illuminated by light intensity of 60 mW/cm2 |
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