光电-静电复合驱动器的驱动性能

吕振,王新杰,刘亚风,赵勇筌

Driving performance of photovoltaic-electrostatic hybrid actuator

Zhen LV,Xin-jie WANG,Ya-feng LIU,Yong-quan ZHAO

图 1 具有倾斜下电极的光电-静电复合驱动器结构及受力示意图

Fig.1 Schematic diagram of photovoltaic electrostatic hybrid actuator with slant lower electrode