基于MEMS传感阵列的海底地形形变原位监测装置

葛勇强,曹晨,陈家旺,徐春莺,周朋,高峰,梁涛,方玉平

In-situ monitoring device for seabed terrain deformation based on MEMS sensor array

Yong-qiang GE,Chen CAO,Jia-wang CHEN,Chun-ying XU,Peng ZHOU,Feng GAO,Tao LIANG,Yu-ping FANG

表 2 微机电系统传感阵列的监测性能

Tab.2 Monitoring performance of micro-electro-mechanical system sensor array

阵列序号 δa δb δc Dmax Dmin mm 1 2.99 12.70 4.51 34.87 0.60 2 4.47 12.69 5.81 50.47 1.07 3 3.19 12.10 4.36 23.98 1.06 4 1.80 6.70 2.61 16.91 0.30