光电-静电复合驱动器的驱动性能

吕振,王新杰,刘亚风,赵勇筌

Driving performance of photovoltaic-electrostatic hybrid actuator

Zhen LV,Xin-jie WANG,Ya-feng LIU,Yong-quan ZHAO

表 2 不同辐射照度下驱动器的驱动性能

Tab.2 Driving performance of actuator illuminated by different light intensity

E/(mW·cm−2) θ0/(°) ts/ms h/μm f/μm 20 0 295 0.5 0.9 20 1.7 135 1.0 2.2 40 0 185 0.7 1.4 40 1.7 80 1.5 3.0 60 0 135 0.9 1.8 60 1.7 65 2.3 4.7