大行程两自由度微定位夹持系统的设计与优化 |
林苗,居勇健,孟刚,王琨,曹毅 |
Design and optimization of large range 2-DOF micro-positioning clamping system |
Miao LIN,Yong-jian JU,Gang MENG,Kun WANG,Yi CAO |
图 8 平台沿x轴方向驱动示意图 |
Fig.8 Schematic diagram of platform driving along x axis direction |