大行程两自由度微定位夹持系统的设计与优化
林苗,居勇健,孟刚,王琨,曹毅

Design and optimization of large range 2-DOF micro-positioning clamping system
Miao LIN,Yong-jian JU,Gang MENG,Kun WANG,Yi CAO
图 8 平台沿x轴方向驱动示意图
Fig.8 Schematic diagram of platform driving along x axis direction