大行程两自由度微定位夹持系统的设计与优化

林苗,居勇健,孟刚,王琨,曹毅

Design and optimization of large range 2-DOF micro-positioning clamping system

Miao LIN,Yong-jian JU,Gang MENG,Kun WANG,Yi CAO

图 20 微定位平台的前4阶模态振型

Fig.20 First four modal shapes of micro-positioning platform