大行程两自由度微定位夹持系统的设计与优化

林苗,居勇健,孟刚,王琨,曹毅

Design and optimization of large range 2-DOF micro-positioning clamping system

Miao LIN,Yong-jian JU,Gang MENG,Kun WANG,Yi CAO

图 16 微定位平台输入输出耦合仿真

Fig.16 Simulation of input and output coupling displacement for micro-positioning platform