大行程两自由度微定位夹持系统的设计与优化 |
林苗,居勇健,孟刚,王琨,曹毅 |
Design and optimization of large range 2-DOF micro-positioning clamping system |
Miao LIN,Yong-jian JU,Gang MENG,Kun WANG,Yi CAO |
图 14 微定位平台x轴方向静态性能验证 |
Fig.14 Static performance verification for micro-positioning platform in x axis direction |
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