大行程两自由度微定位夹持系统的设计与优化 |
林苗,居勇健,孟刚,王琨,曹毅 |
Design and optimization of large range 2-DOF micro-positioning clamping system |
Miao LIN,Yong-jian JU,Gang MENG,Kun WANG,Yi CAO |
图 13 微定位平台x轴方向的静态性能有限元仿真 |
Fig.13 Finite element simulation of static performance for micro-positioning platform in x axis direction |