大行程两自由度微定位夹持系统的设计与优化

林苗,居勇健,孟刚,王琨,曹毅

Design and optimization of large range 2-DOF micro-positioning clamping system

Miao LIN,Yong-jian JU,Gang MENG,Kun WANG,Yi CAO

表 2 优化前后微定位夹持系统的静、动态特性

Tab.2 Static and dynamic performance of micro-positioning clamping system before and after optimization

特征参数 优化前 优化后 优化率/% fp 40.84 Hz 51.16 Hz 25.3 fg 292.81 Hz 346.27 Hz 18.3 δlost 5.16 μm 3.86 μm −25.2 Ramp 15.22 19.61 28.8