基于克里金模型的微电热驱动器优化设计

陈浩,王新杰,王炅,席占稳,曹云

Optimization and design of micro-electro-thermal actuator based on Kriging model

Hao CHEN,Xin-jie WANG,Jiong WANG,Zhan-wen XI,Yun CAO

图 5 U型电热驱动器位移测量实验装置

Fig.5 Experiment setup for measuring displacement of U-shaped electrothermal actuator