基于克里金模型的微电热驱动器优化设计

陈浩,王新杰,王炅,席占稳,曹云

Optimization and design of micro-electro-thermal actuator based on Kriging model

Hao CHEN,Xin-jie WANG,Jiong WANG,Zhan-wen XI,Yun CAO

图 4 加工后的U型电热驱动器结构

Fig.4 Structure of fabricated U-shaped electrothermal actuator