基于克里金模型的微电热驱动器优化设计

陈浩,王新杰,王炅,席占稳,曹云

Optimization and design of micro-electro-thermal actuator based on Kriging model

Hao CHEN,Xin-jie WANG,Jiong WANG,Zhan-wen XI,Yun CAO

图 11 冷、热臂宽度同时作用下U型电热驱动器位移的变化

Fig.11 Change of displacement in U-shaped electrothermal actuator when second and third variables act together