基于迁移学习与深度森林的晶圆图缺陷识别
沈宗礼,余建波

Wafer map defect recognition based on transfer learning and deep forest
Zong-li SHEN,Jian-bo YU
图 7 晶圆缺陷类型数量统计
Fig.7 Number of different types of wafer maps