基于迁移学习与深度森林的晶圆图缺陷识别
Wafer map defect recognition based on transfer learning and deep forest
基于迁移学习与深度森林的晶圆图缺陷识别 |
| 沈宗礼,余建波 |
|
Wafer map defect recognition based on transfer learning and deep forest |
| Zong-li SHEN,Jian-bo YU |
| 图 6 正常晶圆图模式与8种缺陷模式 |
| Fig.6 Normal wafer maps and 8 defect modes |
|
|