基于克里金模型的微电热驱动器优化设计

陈浩,王新杰,王炅,席占稳,曹云

Optimization and design of micro-electro-thermal actuator based on Kriging model

Hao CHEN,Xin-jie WANG,Jiong WANG,Zhan-wen XI,Yun CAO

表 3 加工后的U型电热驱动器测量尺寸

Tab.3 Sizes of fabricated U-shaped electrothermal actuator

参数 数值/µm 参数 数值/µm Lh 3 200 Wc 340 Lc 2 700 Wf 50 Wh 50 tg 100 g 50 − −