基于克里金模型的微电热驱动器优化设计
陈浩,王新杰,王炅,席占稳,曹云

Optimization and design of micro-electro-thermal actuator based on Kriging model
Hao CHEN,Xin-jie WANG,Jiong WANG,Zhan-wen XI,Yun CAO
表 2 单晶硅和空气的材料参数
Tab.2 Material parameters of silicon and air
材料 E/GPa µ ρ/(Ω·mm) α/K−1
169 0.28 0.22 2.6×10−6
空气 3×1016