基于克里金模型的微电热驱动器优化设计

陈浩,王新杰,王炅,席占稳,曹云

Optimization and design of micro-electro-thermal actuator based on Kriging model

Hao CHEN,Xin-jie WANG,Jiong WANG,Zhan-wen XI,Yun CAO

表 1 单晶硅和空气的热传导系数与温度的关系

Tab.1 Relationship between temperature and thermal conductivity of silicon and air

T/K λ/（W∙（m∙K）−1） 单晶硅 空气 300 146.4 0.026 9 600 57.5 0.044 4 900 37.6 0.061 6 1 200 28.2 0.078 1 1 500 25.1 0.093 6