芯片键合纵弯复合超声换能器的设计与试验
胡广豪,薛进学,马文举,隆志力

Design and experiment of longitudinal-flexural composite ultrasonic transducer for chip bonding
Guang-hao HU,Jin-xue XUE,Wen-ju MA,Zhi-li LONG
表 1 纵向超声换能器的结构参数
Tab.1 Structural parameters of longitudinal transducer mm
Ls L1 L2 L3 D1 D2
10 9 18 30 13.5 8