基于迁移学习与深度森林的晶圆图缺陷识别

沈宗礼,余建波

Wafer map defect recognition based on transfer learning and deep forest

Zong-li SHEN,Jian-bo YU

表 5 基于DenseNet特征的多种识别器五折交叉识别率对比

Tab.5 Comparison of five-fold cross recognition rate of various recognizers based on DenseNet features

分类器 Racc/% 分类器 Racc/% GCForest 96.8 SVMG 95.5 BPN 85.1 KNN 92.6 RF 95.1 C4.5 87.2 SVML 95.6 − −