基于迁移学习与深度森林的晶圆图缺陷识别

沈宗礼,余建波

Wafer map defect recognition based on transfer learning and deep forest

Zong-li SHEN,Jian-bo YU

表 1 Densenet-GCForest晶圆缺陷识别率混淆矩阵

Tab.1 Confusion matrix of Densenet-GCForest wafer map defect recognition rate

% 预测真实 None Center Donut Edge-local Edge-ring Local Near-full Random Scratch None 99.59 0.00 0 0.28 0 0 0 0 0.14 Center 0.83 97.52 0 0.83 0 0 0 0 0.83 Donut 0 0 94.74 0 0 5.26 0 0 0 Edge-local 0.86 0.29 0 96.83 0.29 1.44 0 0.29 0 Edge-ring 0 0 0 4.91 95.09 0 0 0 0 Local 0.75 0.38 0 1.51 0 96.23 0 0.75 0.38 Near-full 0 0 0 0 0 0 94.12 5.88 0 Random 0 2.56 0 0 2.56 5.13 2.56 87.18 0 Scratch 1.25 0 0 1.25 0 3.75 0 0 93.75