大尺寸板状构件超声阵列悬浮技术

武二永,韩烨,李立强,邓双,杨克己

Ultrasonic array levitation technology for large size plate like components

Er-yong WU,Ye HAN,Li-qiang LI,Shuang DENG,Ke-ji YANG

图 13 硅片悬浮高度随激励电压变化的实验结果

Fig.13 Experimental results on levitated height of silicon wafer with variable excitation voltage