大尺寸板状构件超声阵列悬浮技术

武二永,韩烨,李立强,邓双,杨克己

Ultrasonic array levitation technology for large size plate like components

Er-yong WU,Ye HAN,Li-qiang LI,Shuang DENG,Ke-ji YANG

图 12 非规则外形硅片的超声悬浮实验结果

Fig.12 Experimental results of ultrasonic levitation of irregular silicon wafers