大尺寸板状构件超声阵列悬浮技术

武二永,韩烨,李立强,邓双,杨克己

Ultrasonic array levitation technology for large size plate like components

Er-yong WU,Ye HAN,Li-qiang LI,Shuang DENG,Ke-ji YANG

图 11 悬浮高度与硅片尺寸之间的关系

Fig.11 Relationship between levitated height and size of silicon wafer