新型VBO接口芯片静电放电防护器件

徐泽坤,沈宏宇,胡涛,李响,董树荣

New electrostatic discharge protection device for VBO high speed chip

Ze-kun XU,Hong-yu SHEN,Tao HU,Xiang LI,Shu-rong DONG

图 3 栅二极管与浅槽隔离二极管的横截面图

Fig.3 Cross-section view of gate diode and STI diode