%A Xiao-hui GUO,Wei-qiang HONG,Guo-qing ZHENG,Jing-yi WANG,Guo-peng TANG,Jin-yang YANG,Chao-qiang ZHUO,Yao-hua XU,Yu-nong ZHAO,Hong-wei ZHANG %T High sensitivity flexible tactile sensor with hierarchical tilted micro-pillar structure %0 Journal Article %D 2022 %J Journal of ZheJiang University (Engineering Science) %R 10.3785/j.issn.1008-973X.2022.06.004 %P 1079-1087, 1126 %V 56 %N 6 %U {https://www.zjujournals.com/eng/CN/abstract/article_44997.shtml} %8 2022-06-05 %X

A flexible tactile sensor was proposed based on the hierarchical titled micro-pillar structure, in order to meet the precise tactile sensing application requirements of capacitive flexible tactile sensors in wearable electronic devices, intelligent robots and other fields. When the sensor was subjected to external pressure, the titled micro-pillar was deformed in stages, resulting in an increase in the capacitance of the sensor. Combined with simulation and experiment, the influence of sensor structure characteristics on its sensitivity were studied, the relationship between sensor signal output and loading pressure designed with different structural parameters was revealed, and the structure of tactile sensor was optimized. The experimental data showed that the sensor had good sensitivity (0.44 kPa?1) and low detection limit (2.6 Pa), the response time was 40 ms, the maximum hysteresis error was 6.7% The sensor exhibits excellent stability and repeatability during 2 400 cycles of loading/unloading, and it can be extended to "skin" arrays of different sizes and shapes, the precise perception of the manipulator and the monitoring of motion postures of the human body were realized.