Please wait a minute...
ZJUS-A
Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering)  2010, Vol. 11 Issue (4): 250-254    DOI: 10.1631/jzus.A1000029
Special Part-issue: 2009 International Symposium on Robotics and Mechatronics     
Design of a long range nano-scale resolution mechanism
Shuo Hung Chang, Jen Bon Lee
Department of Mechanical Engineering, National Taiwan University, Taipei
Download:     PDF (0 KB)     
Export: BibTeX | EndNote (RIS)      

Abstract  This paper presents the development of a coarse-fine dual precision positioning stage to achieve long travel range and high accuracy. The fine stage is arranged in series with a coarse stage. The key in the fine stage design is the choice of a toggle mechanism for a tight mechanical loop with high stiffness and compactness. We designed the toggle mechanism for reduction of the displacement to suppress signal noises. The performance of the coarse and fine stages was verified with an optical encoder and capacitive sensor, respectively. The measurement results show that the dual mechanism has a travel range of 1 mm and resolution of 30 nm.

Key words： Coarse-fine dual stage      Nano-scale resolution      Piezoelectric (PZT) actuator     
Received: 19 January 2010      Published: 29 March 2010
CLC:  TP2  
Service
E-mail this article
Add to my bookshelf
Add to citation manager
E-mail Alert
RSS
Articles by authors
Shuo Hung Chang
Jen Bon Lee
Cite this article:

Shuo Hung Chang, Jen Bon Lee. Design of a long range nano-scale resolution mechanism. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2010, 11(4): 250-254.

URL:

http://www.zjujournals.com/xueshu/zjus-a/10.1631/jzus.A1000029     OR     http://www.zjujournals.com/xueshu/zjus-a/Y2010/V11/I4/250

[1] Xiao-ping Ouyang, Bo-qian Fan, Hua-yong Yang, Shuo Ding. A novel multi-objective optimization method for the pressurized reservoir in hydraulic robotics[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2016, 17(6): 454-467.
[2] Bing Xu, Qian-nan Wang, Jun-hui Zhang. Effect of case drain pressure on slipper/swashplate pair within axial piston pump[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2015, 16(12): 1001-1014.
[3] Qing-long Meng, Xiu-ying Yan, Qing-chang Ren. Global optimal control of variable air volume air-conditioning system with iterative learning: an experimental case study[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2015, 16(4): 302-315.
[4] Chu-dong Tong, Xue-feng Yan, Yu-xin Ma. Statistical process monitoring based on improved principal component analysis and its application to chemical processes[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2013, 14(7): 520-534.
[5] Ning-yun Lu, Gui-xia Gong, Yi Yang, Jian-hua Lu. Multi-objective process parameter optimization for energy saving in injection molding process[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2012, 13(5): 382-394.
[6] Yang Jin, Zhi-yong Hao, Xu Zheng. Comparison of different techniques for time-frequency analysis of internal combustion engine vibration signals[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2011, 12(7): 519-531.
[7] Zhao Zhao, Bin Hu, Jun Liang. Multi-loop adaptive internal model control based on a dynamic partial least squares model[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2011, 12(3): 190-200.
[8] Yu-chuan Liu, Shih-ming Yang, Yu-te Lin. Fuzzy finish time modeling for project scheduling[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2010, 11(12): 946-952.
[9] Abdelhakim Deboucha, Zahari Taha. Identification and control of a small-scale helicopter[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2010, 11(12): 978-985.
[10] Jing Sun, Hisashi Yamamoto, Masayuki Matsui. A study of optimal switching problem in limited-cycle with multiple periods[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2010, 11(12): 933-937.
[11] Yusuke Bota, Hajime Mizuyama, Akio Noda, Tatsuya Nagatani, Ken-ichi Tanaka. A tree-shaped motion strategy for robustly executing robotic assembly tasks[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2010, 11(12): 986-991.
[12] Marco Ceccarelli, Lotfi Romdhane. Design issues for human-machine platform interface in cable-based parallel manipulators for physiotherapy applications[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2010, 11(4): 231-239.
[13] Liang Yan, I-Ming Chen, Song-huat Yeo, Yan Chen, Gui-lin Yang. A high-dexterity low-degree-of-freedom hybrid manipulator structure for robotic lion dance[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2010, 11(4): 240-249.
[14] Ji-en MA, You-tong FANG, Bing XU, Hua-yong YANG. Optimization of cross angle based on the pumping dynamics model[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2010, 11(3): 181-190.
[15] Li-hua LUO, Hong LIU, Ping LI, Hui WANG. Model predictive control for adaptive cruise control with multi-objectives: comfort, fuel-economy, safety and car-following[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2010, 11(3): 191-201.