| Optical Engineering |
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| High-finesse displacement sensor and a theoretical accelerometer model based on a fiber Fabry-Perot interferometer |
| Xu ZENG, Yu WU, Chang-lun HOU, Guo-guang YANG |
| State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China |
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Abstract A displacement sensor based on the fiber Fabry-Perot (F-P) cavity was proposed in this paper. Theoretical and experimental analyses were presented. Displacement resolution was demonstrated by spectrum-domain experiments to obtain the dynamic range of the F-P sensor, and a piezoelectric crystal unit (PZT) was used as the driver. The output signal was modulated by a piezoelectric ceramic ring and demodulated by a phase-locked oscillator. The experimental results show that the displacement resolution of the F-P sensor is less than 5 nm and the dynamic range is more than 100 μm. As acceleration is the second-order differential of displacement, an accelerometer model was proposed using the finite element method (FEM) and ANSYS software.
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Received: 09 April 2008
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