Abstract A displacement sensor based on the fiber Fabry-Perot (F-P) cavity was proposed in this paper. Theoretical and experimental analyses were presented. Displacement resolution was demonstrated by spectrum-domain experiments to obtain the dynamic range of the F-P sensor, and a piezoelectric crystal unit (PZT) was used as the driver. The output signal was modulated by a piezoelectric ceramic ring and demodulated by a phase-locked oscillator. The experimental results show that the displacement resolution of the F-P sensor is less than 5 nm and the dynamic range is more than 100 μm. As acceleration is the second-order differential of displacement, an accelerometer model was proposed using the finite element method (FEM) and ANSYS software.
Xu ZENG, Yu WU, Chang-lun HOU, Guo-guang YANG. High-finesse displacement sensor and a theoretical accelerometer model based on a fiber Fabry-Perot interferometer. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2009, 10(4): 589-594.
JIAO Guo-hua, LI Yu-lin, ZHANG Dong-bo, LI Tong-hai, HU Bao-wen. A laser shaft alignment system with dual PSDs[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2006, 7(10): 21-.
