Please wait a minute...
Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering)  2010, Vol. 11 Issue (10): 722-726    DOI: 10.1631/jzus.A1000175
    
Effect of template shape on metal nanoimprinting: a dislocation dynamics study
Yun-he Zhang, Lucia Nicola
Department of Materials Science and Engineering, Delft University of Technology, 2628 CD Delft, the Netherlands
Download:     PDF (0 KB)     
Export: BibTeX | EndNote (RIS)      

Abstract  Dislocation dynamics simulations are performed to investigate the effect of template shape on the nanoimprinting of metal layers. To this end, metal thin films are imprinted by a rigid template made of an array of equispaced indenters of various shapes, i.e., rectangular, wedge, and circular. The geometry of the indenters is chosen such that the contact area is approximately the same at the final imprinting depth. Results show that, for all template shapes, the final patterns strongly depend on the dislocation activity, and that each imprint differs from the neighboring ones. Large material pile ups appear between the imprints, such that polishing of the metal layer is suggested for application of the patterns in electronics. Rectangular indenters require the lowest imprinting force and achieve the deepest retained imprints.

Key wordsNanoimprinting      Dislocation dynamics      Simulations     
Received: 16 April 2010      Published: 05 October 2010
CLC:  TB3  
Cite this article:

Yun-he Zhang, Lucia Nicola. Effect of template shape on metal nanoimprinting: a dislocation dynamics study. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2010, 11(10): 722-726.

URL:

http://www.zjujournals.com/xueshu/zjus-a/10.1631/jzus.A1000175     OR     http://www.zjujournals.com/xueshu/zjus-a/Y2010/V11/I10/722

[1] Cheng PENG, Zhi LI, Xiao-min SUN. Molecular simulations of methane, ethane and propane adsorption on TON[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2009, 10(11): 1636-1641.