| Science & Engineering |
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| A NOVEL STRUCTURE OF ALL-OPTICAL TYPE SILICON MICRORESONATOR |
| DING Chun, WANG Yue-lin, JIN Zhong-he, WANG Dong-ping, |
| Dept. of Information Science and Electronic Engineering; State Key Laboratory of Transducer Technology, Zhejiang University, Hangzhou 310027, China |
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Abstract A novel All-Optical type Silicon MicroResonator (AOSMR), with exciting and testing optical fibers is reported in this paper. It consists of a ridge optical waveguide and input and output optical fibers to pick up vibrations. The advantages include simplicity in structure and convenience in operation. Both theoretical analysis and experimental results showed that the new structure has large misalignment tolerance between the fiber and vibrator. The optical length of the fiber does not affect the output signal. In addition, the resonant frequency of the vibrator is independent of the internal stress of the silicon wafer.
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Received: 12 August 1999
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