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IET Cyber-Systems and Robotics  2020, Vol. 2 Issue (4): 161-167    DOI: https://doi.org/10.1049/iet-csr.2020.0024
    
基于扰动估计的纳米定位平台二阶终端滑模控制
Ali Al-Ghanimi; Jinchuan Zheng; Alaa Aldhalemi ; Jasim Khawwaf; Zhihong Man
Faculty of Engineering, University of Kufa, Al‐Najaf Al‐Ashraf, Kufa, Iraq
Second‐order terminal sliding mode control based on perturbation estimation for nanopositioning stage
Ali Al-Ghanimi; Jinchuan Zheng; Alaa Aldhalemi ; Jasim Khawwaf; Zhihong Man
Faculty of Engineering, University of Kufa, Al‐Najaf Al‐Ashraf, Kufa, Iraq
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摘要: 本研究提出了一种基于扰动估计的鲁棒二阶终端滑模控制策略(2OTSMCPE),并将其应用于柔性纳米定位系统的轨迹跟踪控制。该控制器不仅具有有限时间收敛性,而且采用了具有开关函数的二阶滑动面,可以提供较高的跟踪精度和抖振抑制。本文首先给出了压电驱动的纳米定位系统模型。紧接着,设计了比例-积分-微分形式的滑动变量,以增强控制系统的动态响应。随后,使用一个非奇异终端滑模函数(NTSM)来实现线性滑动变量的有限时间收敛。之后,将一个扰动估计方法与控制结构相结合,以实现对系统不确定性的在线估计,因此,在本文所提出的控制方法中,不需要系统不确定性边界的先验知识。随后,本文对2OTSMCPE进行了理论分析和稳定性证明。最后,对提出的控制器的系统性能进行了实验验证。实验结果表明,与传统滑模控制器和NTSM控制器相比,2OTSMCPE具有更强的鲁棒性和更平滑的控制信号。
Abstract: This study proposes a robust second-order terminal sliding mode control with perturbation estimation (2OTSMCPE) strategy with application to trajectory tracking control of the flexure-based nanopositioning system. The proposed controller advantages not only lie on its finite-time convergence but also can provide a high tracking precision with a chattering alleviation which is attend by employing a second-order sliding surface with the switching function. The model of the piezo-driven nanopositioning system is presented first. Second, the sliding variable is designed such as proportional–integral–derivative form to enhance the dynamic response of the control system. Then, a non-singular terminal sliding function (NTSM) is used to achieve the finite-time convergence of the linear sliding variable. Next, a perturbation estimation technique is integrated with the control structure for online estimation of the system uncertainties, thus the prior knowledge of the bounds of system uncertainties are not needed in the proposed control design. Afterwards, the theoretical analysis of the 2OTSMCPE with stability proof is investigated herein. Finally, the system performance with the proposed controller is experimentally verified. The results reveal that the 2OTSMCPE has stronger robustness and also has smoother control signals in comparison with both conventional sliding mode control and the NTSM controller.
收稿日期: 2020-04-30 出版日期: 2020-11-13
通讯作者: Ali Al‐Ghanimi     E-mail: alih.alghanimi@uokufa.edu.iq
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引用本文:

Ali Al-Ghanimi, Jinchuan Zheng, Alaa Aldhalemi, Jasim Khawwaf, Zhihong Man. Second‐order terminal sliding mode control based on perturbation estimation for nanopositioning stage. IET Cyber-Systems and Robotics, 2020, 2(4): 161-167.

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http://www.zjujournals.com/iet-csr/CN/https://doi.org/10.1049/iet-csr.2020.0024        http://www.zjujournals.com/iet-csr/CN/Y2020/V2/I4/161

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