集成化智能软体机器人研究进展
郝天泽,肖华平,刘书海,张超,马豪

Research status of integrated intelligent soft robots
Tian-ze HAO,Hua-ping XIAO,Shu-hai LIU,Chao ZHANG,Hao MA
图 7 多层软光刻制造过程[76]
Fig.7 Manufacturing process of multilayer soft lithography[76]