基于迁移学习与深度森林的晶圆图缺陷识别
沈宗礼,余建波

Wafer map defect recognition based on transfer learning and deep forest
Zong-li SHEN,Jian-bo YU
图 9 晶圆图多级网络输出特征
Fig.9 Output features of wafer maps in multilevel networks