基于迁移学习与深度森林的晶圆图缺陷识别
Wafer map defect recognition based on transfer learning and deep forest
基于迁移学习与深度森林的晶圆图缺陷识别 |
| 沈宗礼,余建波 |
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Wafer map defect recognition based on transfer learning and deep forest |
| Zong-li SHEN,Jian-bo YU |
| 图 5 DenseNet-GCForest晶圆图缺陷识别流程 |
| Fig.5 Defect identification process of DenseNet-GCForest wafer map |
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