基于迁移学习与深度森林的晶圆图缺陷识别
沈宗礼,余建波
Wafer map defect recognition based on transfer learning and deep forest
Zong-li SHEN,Jian-bo YU
表 4
五折交叉识别率对比
Tab.4
Comparison of five-fold cross validation of various algorithms
分类器
R
acc
/%
分类器
R
acc
/%
DenseNet-GCForest
96.8
GCForest
73.7
C4.5 Ensemble
90.8
RF
68.9
SDAE
89.4
SVML
72.5
DenseNet
88.6
SVMG
40.2
GoogleNet
74.3
KNN
30.1
ResNet
86.5
C4.5
62.4