采用恒频参量激励的微机械陀螺驱动控制方案

林一羽,郑旭东,吴海斌,马志鹏,金仲和

MEMS gyroscopes parametric excitation control scheme with constant resonant frequency

Yi-yu LIN,Xu-dong ZHENG,Hai-bin WU,Zhi-peng MA,Zhong-he JIN

图 1 栅结构微机械结构示意图

Fig.1 Schematic diagram of slot-structure gyrosocpe