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Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering)  2009, Vol. 10 Issue (10): 1421-1427    DOI: 10.1631/jzus.A0820327
Radio Electronics     
Characterization of a-Si:H/SiN multilayer waveguide polarization using an optical pumping application鈥擫ED
Mohd Saiful Dzulkefly ZAN, Isamu KATO, Mohammad Syuhaimi AB-RAHMAN, Seri Mastura MUSTAZA
Department of Electrical, Electronic and System Engineering, Faculty of Engineering and Built Environment, Universiti Kebangsaan Malaysia, Bangi 43600, Malaysia; Department of Electrical Engineering and Bioscience, Waseda University, Tokyo 169-855, Japan
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Abstract  This paper describes the fabrication of a waveguide and the analysis of its polarization characteristics by applying light-emitting diode (LED) pumping lights to its surface. By using double tubed coaxial line (DTCL) microwave plasma chemical vapor deposition (MPCVD) equipment, an a-Si:H/SiN multilayer waveguide was fabricated whose thickness could be controlled at nanometer order. The main structural material of the waveguide sample consisted of a combination of layers of amorphous silicon hydrogen and silicon nitrate. Once the sample was ready, another major objective of the experiment was to analyze the polarization characteristics of the fabricated waveguide. The idea of the experiment was to analyze how the waveguide reacts when three types of LED (blue, yellow, and red) are radiated onto its surface. The results showed that the fabrication of the a-Si:H/SiN sample is successful. Most effective transmission results, which accord with the polarization characteristics analysis, were obtained.

Key wordsWaveguide      Multilayer      Optical pumping      Light-emitting diode (LED)      Double tubed coaxial line microwave plasma chemical vapor deposition (DTCL-MPCVD)     
Received: 30 April 2008      Published: 12 October 2009
CLC:  TN25  
Cite this article:

Mohd Saiful Dzulkefly ZAN, Isamu KATO, Mohammad Syuhaimi AB-RAHMAN, Seri Mastura MUSTAZA. Characterization of a-Si:H/SiN multilayer waveguide polarization using an optical pumping application鈥擫ED. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2009, 10(10): 1421-1427.

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http://www.zjujournals.com/xueshu/zjus-a/10.1631/jzus.A0820327     OR     http://www.zjujournals.com/xueshu/zjus-a/Y2009/V10/I10/1421

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